Optical and capacitive characterization of MEMS magnetic resonator

Optical and capacitive characterization of MEMS magnetic resonator

In this paper a Lorentz force driven Micro ELectro Mechanical Sytems (MEMS) resonator fabricated on PolyMUMP process with optical and capacitive sensing is presented. The resonator is designed by combining the two poly layers which result in an increase in the thickness of the resonator. Lorentz for...

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Bibliographic Details
Main Authors: Mian, M.U., Dennis, J.O., Khir, M.H.B.M., Ahmed, M.G.A., Rabih, A.A.S., Tang, T.B.
Format: Article
Published: Institute of Electronics Information Communication Engineers 2016
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-84989179721&doi=10.1587%2felex.13.20160773&partnerID=40&md5=85ba6e6e2f9a082b5129f8caa39d3d51
http://eprints.utp.edu.my/25482/
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Institution: Universiti Teknologi Petronas

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https://www.scopus.com/inward/record.uri?eid=2-s2.0-84989179721&doi=10.1587%2felex.13.20160773&partnerID=40&md5=85ba6e6e2f9a082b5129f8caa39d3d51
http://eprints.utp.edu.my/25482/

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