Optical and capacitive characterization of MEMS magnetic resonator

In this paper a Lorentz force driven Micro ELectro Mechanical Sytems (MEMS) resonator fabricated on PolyMUMP process with optical and capacitive sensing is presented. The resonator is designed by combining the two poly layers which result in an increase in the thickness of the resonator. Lorentz for...

Full description

Saved in:
Bibliographic Details
Main Authors: Mian, M.U., Dennis, J.O., Khir, M.H.B.M., Ahmed, M.G.A., Rabih, A.A.S., Tang, T.B.
Format: Article
Published: Institute of Electronics Information Communication Engineers 2016
Online Access:https://www.scopus.com/inward/record.uri?eid=2-s2.0-84989179721&doi=10.1587%2felex.13.20160773&partnerID=40&md5=85ba6e6e2f9a082b5129f8caa39d3d51
http://eprints.utp.edu.my/25482/
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Universiti Teknologi Petronas
id my.utp.eprints.25482
record_format eprints
spelling my.utp.eprints.254822021-08-27T13:02:05Z Optical and capacitive characterization of MEMS magnetic resonator Mian, M.U. Dennis, J.O. Khir, M.H.B.M. Ahmed, M.G.A. Rabih, A.A.S. Tang, T.B. In this paper a Lorentz force driven Micro ELectro Mechanical Sytems (MEMS) resonator fabricated on PolyMUMP process with optical and capacitive sensing is presented. The resonator is designed by combining the two poly layers which result in an increase in the thickness of the resonator. Lorentz force generates lateral displacements at low driving voltages which are proportional to the magnetic field and the input current. A displacement of more than 9.8 μm was achieved with a magnetic field of 0.12 T and a driving current of 27 mA. Magnetic sensitivity of 1.41 V/Tin air was experimentally measured using permanent magnets and capacitive sensing circuitry. Optical results demonstrate the sensitivity values between 0.090 μm/mT and 0.074 μm m/mT. © IEICE 2016. Institute of Electronics Information Communication Engineers 2016 Article NonPeerReviewed https://www.scopus.com/inward/record.uri?eid=2-s2.0-84989179721&doi=10.1587%2felex.13.20160773&partnerID=40&md5=85ba6e6e2f9a082b5129f8caa39d3d51 Mian, M.U. and Dennis, J.O. and Khir, M.H.B.M. and Ahmed, M.G.A. and Rabih, A.A.S. and Tang, T.B. (2016) Optical and capacitive characterization of MEMS magnetic resonator. IEICE Electronics Express, 13 (18). http://eprints.utp.edu.my/25482/
institution Universiti Teknologi Petronas
building UTP Resource Centre
collection Institutional Repository
continent Asia
country Malaysia
content_provider Universiti Teknologi Petronas
content_source UTP Institutional Repository
url_provider http://eprints.utp.edu.my/
description In this paper a Lorentz force driven Micro ELectro Mechanical Sytems (MEMS) resonator fabricated on PolyMUMP process with optical and capacitive sensing is presented. The resonator is designed by combining the two poly layers which result in an increase in the thickness of the resonator. Lorentz force generates lateral displacements at low driving voltages which are proportional to the magnetic field and the input current. A displacement of more than 9.8 μm was achieved with a magnetic field of 0.12 T and a driving current of 27 mA. Magnetic sensitivity of 1.41 V/Tin air was experimentally measured using permanent magnets and capacitive sensing circuitry. Optical results demonstrate the sensitivity values between 0.090 μm/mT and 0.074 μm m/mT. © IEICE 2016.
format Article
author Mian, M.U.
Dennis, J.O.
Khir, M.H.B.M.
Ahmed, M.G.A.
Rabih, A.A.S.
Tang, T.B.
spellingShingle Mian, M.U.
Dennis, J.O.
Khir, M.H.B.M.
Ahmed, M.G.A.
Rabih, A.A.S.
Tang, T.B.
Optical and capacitive characterization of MEMS magnetic resonator
author_facet Mian, M.U.
Dennis, J.O.
Khir, M.H.B.M.
Ahmed, M.G.A.
Rabih, A.A.S.
Tang, T.B.
author_sort Mian, M.U.
title Optical and capacitive characterization of MEMS magnetic resonator
title_short Optical and capacitive characterization of MEMS magnetic resonator
title_full Optical and capacitive characterization of MEMS magnetic resonator
title_fullStr Optical and capacitive characterization of MEMS magnetic resonator
title_full_unstemmed Optical and capacitive characterization of MEMS magnetic resonator
title_sort optical and capacitive characterization of mems magnetic resonator
publisher Institute of Electronics Information Communication Engineers
publishDate 2016
url https://www.scopus.com/inward/record.uri?eid=2-s2.0-84989179721&doi=10.1587%2felex.13.20160773&partnerID=40&md5=85ba6e6e2f9a082b5129f8caa39d3d51
http://eprints.utp.edu.my/25482/
_version_ 1738656736305217536