Investigation of zinc oxide thin film by spectroscopic ellipsometry
ZnO films were deposited on glass substrates by magnetron R F-sputtering. An accurate determ ination of the optical constants of these films is extremely important prior to its application in optical devices and spectroscopic ellipsometry provides a reasonably accurate method for the determination o...
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Main Authors: | , , , , |
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Format: | Article |
Language: | English |
Published: |
H. : ĐHQGHN
2017
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Subjects: | |
Online Access: | http://repository.vnu.edu.vn/handle/VNU_123/57409 |
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Institution: | Vietnam National University, Hanoi |
Language: | English |