Investigation of zinc oxide thin film by spectroscopic ellipsometry

ZnO films were deposited on glass substrates by magnetron R F-sputtering. An accurate determ ination of the optical constants of these films is extremely important prior to its application in optical devices and spectroscopic ellipsometry provides a reasonably accurate method for the determination o...

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Bibliographic Details
Main Authors: Nguyen, Nam Dinh, Tran, Quang Trung, Le, Khac Binh, Nguyen, Dang Khoa, Vo, Thi Mai Thuan
Format: Article
Language:English
Published: H. : ĐHQGHN 2017
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Online Access:http://repository.vnu.edu.vn/handle/VNU_123/57409
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Institution: Vietnam National University, Hanoi
Language: English