Spectroscopic imaging ellipsometry for thin film detection on uniaxial crystal

• Main Authors: Guan, Lichao, Ding, Jiexiong, Du, Li, Adhikari, Achyut, Asundi, Anand Krishna
• Other Authors: Asundi, Anand K.
• Format: Article
• Language: English
• Published: 2019
• Subjects: Spectroscopic Imaging Ellipsometry; Engineering::Mechanical engineering; Uniaxial Crystal
• Online Access: https://hdl.handle.net/10356/106364; http://hdl.handle.net/10220/49577
• Institution: Nanyang Technological University

Spectroscopic imaging ellipsometry (SIE) is a powerful technique devoted to the study of optical properties and thickness of thin films by measuring the change in polarization state of light reflected from the surface. SIE measures two quantities (Ψ and Δ ), which represent the amplitude ratio and p...