Spectroscopic imaging ellipsometry for thin film detection on uniaxial crystal
Spectroscopic imaging ellipsometry (SIE) is a powerful technique devoted to the study of optical properties and thickness of thin films by measuring the change in polarization state of light reflected from the surface. SIE measures two quantities (Ψ and Δ ), which represent the amplitude ratio and p...
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| Main Authors: | , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2019
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| Subjects: | |
| Online Access: | https://hdl.handle.net/10356/106364 http://hdl.handle.net/10220/49577 |
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| Institution: | Nanyang Technological University |
| Language: | English |