Application of FFT in testing the sensitivity of a typical single-axis integrated circuit Hi-G MEMS accelerometer

• Main Author: Caguioa, Robert Z.
• Format: text
• Language: English
• Published: Animo Repository 2005
• Subjects: Microelectromechanical systems; Fourier transformations; Gravimeters (Geophysical instruments); Electrical and Electronics
• Online Access: https://animorepository.dlsu.edu.ph/etd_masteral/6500; https://animorepository.dlsu.edu.ph/context/etd_masteral/article/12803/viewcontent/CDTG003883_P.pdf
• Institution: De La Salle University

MEMS or Microelectro-Mechanical Systems is a technology that integrates electrical and mechanical parts on a common substrate through the use of micro-fabrication techniques. This technology brings into reality a number of wonderful products such as inertial sensors (accelerometers), communications...