Surface analysis of silicon (100) wafer after contact electrification using Kelvin force microscopy

• Main Authors: Esmeria, Jose M., Jr., Pobre, Romeric F.
• 格式: text
• 出版: Animo Repository 2017
• 主題: Volta effect; Surfaces (Physics); Interfaces (Physical sciences); Silicon—Electric properties; Physics
• 在線閱讀: https://animorepository.dlsu.edu.ph/faculty_research/11335; https://animorepository.dlsu.edu.ph/context/faculty_research/article/9144/viewcontent/MANILA_JOURNAL_OF_SCIENCE_Surface_Analysis_of_Silicon__100__Wafer_After_Contact_Electrification_Using_Kelvin_Force_Microscopy.pdf

Contact electrification was demonstrated on Si (100) wafer, and surface charge images at submicron scale were analysed using Kelvin force microscopy (KFM). Potential map images have shown carpet-like patterns on the (100) plane of Si wafer. Individual potential spikes that appeared on the surface ar...