Surface analysis of silicon (100) wafer after contact electrification using Kelvin force microscopy

Contact electrification was demonstrated on Si (100) wafer, and surface charge images at submicron scale were analysed using Kelvin force microscopy (KFM). Potential map images have shown carpet-like patterns on the (100) plane of Si wafer. Individual potential spikes that appeared on the surface ar...

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Bibliographic Details
Main Authors: Esmeria, Jose M., Jr., Pobre, Romeric F.
Format: text
Published: Animo Repository 2017
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Online Access:https://animorepository.dlsu.edu.ph/faculty_research/11335
https://animorepository.dlsu.edu.ph/context/faculty_research/article/9144/viewcontent/MANILA_JOURNAL_OF_SCIENCE_Surface_Analysis_of_Silicon__100__Wafer_After_Contact_Electrification_Using_Kelvin_Force_Microscopy.pdf
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Institution: De La Salle University

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