Silicon photonics process simplification - grating mask reduction
In Silicon Photonics, grating couplers are used as a surface-coupling optical component for guiding light in a preferential direction for process control. However, edge couplers can achieve rather high coupling efficiency, broad bandwidth, and polarization independence, which are normally used...
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| Format: | Thesis-Master by Coursework |
| Language: | English |
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Nanyang Technological University
2025
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| Online Access: | https://hdl.handle.net/10356/182802 |
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| Institution: | Nanyang Technological University |
| Language: | English |