Spin coated YSZ thin films on silicon substrate

• Main Authors: Palisoc, Shirley Tiong, Tegio, Rose Ann, Natividad, Michelle T., Mendiola, Simon Gerard, Tuason, Benjamin, Kaw, Kevin Anthony Y., Tadios, Stephen
• Format: text
• Published: Animo Repository 2012
• Subjects: Physics
• Online Access: https://animorepository.dlsu.edu.ph/faculty_research/11676
• Institution: De La Salle University

Yttria Stabilized Zirconia (YSZ) thin films (<10 μm) were fabricated by spin coating technique on silicon (Si). Parameters such as concentration ratio of YSZ powder to solvent were varied accordingly. The effects of these variations were investigated and discussed. Using X-ray Diffraction and Ram...