Spin coated YSZ thin films on silicon substrate

Spin coated YSZ thin films on silicon substrate

Yttria Stabilized Zirconia (YSZ) thin films (<10 μm) were fabricated by spin coating technique on silicon (Si). Parameters such as concentration ratio of YSZ powder to solvent were varied accordingly. The effects of these variations were investigated and discussed. Using X-ray Diffraction and Ram...

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Bibliographic Details
Main Authors: Palisoc, Shirley Tiong, Tegio, Rose Ann, Natividad, Michelle T., Mendiola, Simon Gerard, Tuason, Benjamin, Kaw, Kevin Anthony Y., Tadios, Stephen
Format: text
Published: Animo Repository 2012
Subjects:
Physics
Online Access:https://animorepository.dlsu.edu.ph/faculty_research/11676
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Institution: De La Salle University
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Summary:Yttria Stabilized Zirconia (YSZ) thin films (<10 μm) were fabricated by spin coating technique on silicon (Si). Parameters such as concentration ratio of YSZ powder to solvent were varied accordingly. The effects of these variations were investigated and discussed. Using X-ray Diffraction and Raman Spectroscopy, the crystal structure of the samples were determined. The 8-YSZ thin films have cubic fluorite structure. The Xray diffraction patterns were in agree

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