Integration of IC technology with MEMS: Silicon+ technology for the future
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2007
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oai:scholars.utp.edu.my:366062023-06-19T04:41:00Z http://scholars.utp.edu.my/id/eprint/36606/ Integration of IC technology with MEMS: Silicon+ technology for the future Walton, AJ Stevenson, JTM Underwood, Ian Terry, JG Smith, S Parkes, William Dunare, Camelia Lin, H Li, Yifan Henderson, Robert others IET 2007 Article NonPeerReviewed Walton, AJ and Stevenson, JTM and Underwood, Ian and Terry, JG and Smith, S and Parkes, William and Dunare, Camelia and Lin, H and Li, Yifan and Henderson, Robert and others (2007) Integration of IC technology with MEMS: Silicon+ technology for the future. |
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Universiti Teknologi Petronas |
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Asia |
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Malaysia |
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Universiti Teknologi Petronas |
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http://eprints.utp.edu.my/ |
| format |
Article |
| author |
Walton, AJ Stevenson, JTM Underwood, Ian Terry, JG Smith, S Parkes, William Dunare, Camelia Lin, H Li, Yifan Henderson, Robert others |
| spellingShingle |
Walton, AJ Stevenson, JTM Underwood, Ian Terry, JG Smith, S Parkes, William Dunare, Camelia Lin, H Li, Yifan Henderson, Robert others Integration of IC technology with MEMS: Silicon+ technology for the future |
| author_facet |
Walton, AJ Stevenson, JTM Underwood, Ian Terry, JG Smith, S Parkes, William Dunare, Camelia Lin, H Li, Yifan Henderson, Robert others |
| author_sort |
Walton, AJ |
| title |
Integration of IC technology with MEMS: Silicon+ technology for the future |
| title_short |
Integration of IC technology with MEMS: Silicon+ technology for the future |
| title_full |
Integration of IC technology with MEMS: Silicon+ technology for the future |
| title_fullStr |
Integration of IC technology with MEMS: Silicon+ technology for the future |
| title_full_unstemmed |
Integration of IC technology with MEMS: Silicon+ technology for the future |
| title_sort |
integration of ic technology with mems: silicon+ technology for the future |
| publisher |
IET |
| publishDate |
2007 |
| url |
http://scholars.utp.edu.my/id/eprint/36606/ |
| _version_ |
1769845530340360192 |