Integration of IC technology with MEMS: Silicon+ technology for the future

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Bibliographic Details
Main Authors:	Walton, AJ, Stevenson, JTM, Underwood, Ian, Terry, JG, Smith, S, Parkes, William, Dunare, Camelia, Lin, H, Li, Yifan, Henderson, Robert, others
Format:	Article
Published:	IET 2007
Online Access:	http://scholars.utp.edu.my/id/eprint/36606/
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Institution:	Universiti Teknologi Petronas

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