DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS STATIC TO LOW FREQUENCY MAGNETIC FIELD SENSOR

DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS STATIC TO LOW FREQUENCY MAGNETIC FIELD SENSOR

This PhD thesis reports the design, modeling, simulation, fabrication and characterization of a novel CMOS-MEMS magnetic field sensor (main device). This sensor consists of two major components, 1) resonating shuttle and 2) set of torsional coils. Each component works as magnetic sensor itself. T...

Full description

Saved in:
Bibliographic Details
Main Author: ,, FAROOQ AHMAD
Format: Thesis
Language:English
Published: 2015
Subjects:
TK Electrical engineering. Electronics Nuclear engineering
Online Access:http://utpedia.utp.edu.my/id/eprint/21549/1/2015%20-ELECTRICAL%20%26%20ELECTRONICS%20-%20DESIGN%2C%20FABRICATION%20%26%20CHARACTERIZATION%20OF%20A%20CMOS-MEMS%20STSTIC%20TO%20LOW%20FREQUENCY%20MAGNETIC%20FIELD%20SENSOR%20-%20FAROOQ%20AHMAD.pdf
http://utpedia.utp.edu.my/id/eprint/21549/
Tags: Add Tag
No Tags, Be the first to tag this record!
Institution: Universiti Teknologi Petronas
Language: English

Internet

http://utpedia.utp.edu.my/id/eprint/21549/1/2015%20-ELECTRICAL%20%26%20ELECTRONICS%20-%20DESIGN%2C%20FABRICATION%20%26%20CHARACTERIZATION%20OF%20A%20CMOS-MEMS%20STSTIC%20TO%20LOW%20FREQUENCY%20MAGNETIC%20FIELD%20SENSOR%20-%20FAROOQ%20AHMAD.pdf
http://utpedia.utp.edu.my/id/eprint/21549/

Similar Items