DESIGN, FABRICATION AND CHARACTERIZATION OF A CMOS-MEMS STATIC TO LOW FREQUENCY MAGNETIC FIELD SENSOR

• Main Author: ,, FAROOQ AHMAD
• Format: Thesis
• Language: English
• Published: 2015
• Subjects: TK Electrical engineering. Electronics Nuclear engineering
• Online Access: http://utpedia.utp.edu.my/id/eprint/21549/1/2015%20-ELECTRICAL%20%26%20ELECTRONICS%20-%20DESIGN%2C%20FABRICATION%20%26%20CHARACTERIZATION%20OF%20A%20CMOS-MEMS%20STSTIC%20TO%20LOW%20FREQUENCY%20MAGNETIC%20FIELD%20SENSOR%20-%20FAROOQ%20AHMAD.pdf; http://utpedia.utp.edu.my/id/eprint/21549/
• Institution: Universiti Teknologi Petronas

This PhD thesis reports the design, modeling, simulation, fabrication and characterization of a novel CMOS-MEMS magnetic field sensor (main device). This sensor consists of two major components, 1) resonating shuttle and 2) set of torsional coils. Each component works as magnetic sensor itself. T...