Fabrication of a Capacitive Relative Humidity Sensor Using Aluminum Thin Films Deposited on Etched Printed Circuit Board
A capacitive humidity-sensing device was created by thermal evaporation of 99.999% aluminum. The substrate used for the coating was etched double-sided printed circuit board. The etched printed circuit board serves as the dielectric of the capacitor while the aluminum thin films deposited on either...
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Main Authors: | , |
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Format: | text |
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Archīum Ateneo
2016
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Online Access: | https://archium.ateneo.edu/physics-faculty-pubs/102 https://archium.ateneo.edu/cgi/viewcontent.cgi?article=1123&context=physics-faculty-pubs |
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Institution: | Ateneo De Manila University |