Fabrication of a Capacitive Relative Humidity Sensor Using Aluminum Thin Films Deposited on Etched Printed Circuit Board

• Main Authors: Lee, Jacqueline Ann L, Culaba, Ivan B
• Format: text
• Published: Archīum Ateneo 2016
• Subjects: Physics
• Online Access: https://archium.ateneo.edu/physics-faculty-pubs/102; https://archium.ateneo.edu/cgi/viewcontent.cgi?article=1123&context=physics-faculty-pubs
• Institution: Ateneo De Manila University

A capacitive humidity-sensing device was created by thermal evaporation of 99.999% aluminum. The substrate used for the coating was etched double-sided printed circuit board. The etched printed circuit board serves as the dielectric of the capacitor while the aluminum thin films deposited on either...