Electrical properties of amorphous chalcogenide/silicon heterojunctions modified by ion implantation

• Main Authors: Hewak, Dan W., Fedorenko, Yanina G., Lee, Tae-Hoon, Hughes, Mark A., Colaux, Julien L., Jeynes, C., Gwilliam, Russell M., Homewood, Kevin P., Yao, Jin, Elliott, Stephen R., Gholipour, B., Curry, Richard J.
• 其他作者: Digonnet, Michel J. F.
• 格式: Conference or Workshop Item
• 語言: English
• 出版: 2014
• 主題: DRNTU::Science
• 在線閱讀: https://hdl.handle.net/10356/100033; http://hdl.handle.net/10220/19677

Doping of amorphous chalcogenide films of rather dissimilar bonding type and resistivity, namely, Ga-La-S, GeTe, and Ge-Sb-Te by means of ion implantation of bismuth is considered. To characterize defects induced by ionbeam implantation space-charge-limited conduction and capacitance-voltage charact...