Properties of porous AlN multilayered ceramic sandwich substrates

• Main Authors: Tok, Alfred Iing Yoong, Long, Y., Yeong, H. Y., Boey, Freddy Yin Chiang
• Other Authors: School of Materials Science & Engineering
• Format: Article
• Language: English
• Published: 2014
• Subjects: DRNTU::Engineering::Materials
• Online Access: https://hdl.handle.net/10356/102046; http://hdl.handle.net/10220/18840
• Institution: Nanyang Technological University

The development of denser and higher powered integrated circuits has led to a corresponding demand on the performance of dielectric substrates. This paper reports on the fabrication and properties of an AlN multilayered sandwich substrate comprising porous tape-cast layers sandwiched between nonpo...