Novel processes for an Al2O3/AlN composite system as dielectric substrate for microelectronics application

• Main Author: Sun, Li Min.
• Other Authors: Boey, Freddy Yin Chiang
• Format: Theses and Dissertations
• Language: English
• Published: 2008
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials
• Online Access: http://hdl.handle.net/10356/13469
• Institution: Nanyang Technological University

Recent development of higher power and higher speed in integrated circuits has led to a corresponding demand in improvement for dielectric substrate materials. Conventional Al2O3 system has probably reached its maximum possible performance, with AlN being a prospective alternative, due to its signif...