Influence of different CH4/N2 ratios on structural and mechanical properties of a-CNx : H film synthesized using plasma focus
Carbon nitride films were synthesized by operating the dense plasma focus device with different CH4/N2 admixture gas ratios and fixed 20 focus shots. The pressure and axial distance from anode tip were kept constant at 3 mbar and 8 cm respectively. Raman and X-ray photoelectron spectroscopy (XPS) te...
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Main Authors: | , , , , , , , , |
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Other Authors: | |
Format: | Article |
Language: | English |
Published: |
2014
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Subjects: | |
Online Access: | https://hdl.handle.net/10356/102609 http://hdl.handle.net/10220/24292 |
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Institution: | Nanyang Technological University |
Language: | English |