Digital holographic microscopy for MEMS/MOEMS device inspection and complete characterization

• المؤلفون الرئيسيون: Singh, Vijay Raj, Asundi, Anand, Hegde, G. M.
• مؤلفون آخرون: School of Mechanical and Aerospace Engineering
• التنسيق: مقال
• اللغة: English
• منشور في: 2015
• الموضوعات: DRNTU::Engineering::Aeronautical engineering
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/103081; http://hdl.handle.net/10220/25821; http://journal.library.iisc.ernet.in/index.php/iisc/article/view/1110/1339
• المؤسسة: Nanyang Technological University

Digital holography became feasible since the availability of charged coupled devices (CCDs) with smaller pixel sizes, higher pixel numbers and high speed computers. Fresnel or Fourier holograms are recorded directly by the CCD and stored digitally in the computer. The reconstruction of the wavefield...