Digital holographic microscopy for MEMS/MOEMS device inspection and complete characterization

• Main Authors: Singh, Vijay Raj, Asundi, Anand, Hegde, G. M.
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2015
• Subjects: DRNTU::Engineering::Aeronautical engineering
• Online Access: https://hdl.handle.net/10356/103081; http://hdl.handle.net/10220/25821; http://journal.library.iisc.ernet.in/index.php/iisc/article/view/1110/1339
• Institution: Nanyang Technological University

Digital holography became feasible since the availability of charged coupled devices (CCDs) with smaller pixel sizes, higher pixel numbers and high speed computers. Fresnel or Fourier holograms are recorded directly by the CCD and stored digitally in the computer. The reconstruction of the wavefield...