Indentation damage evaluation on metal-coated thin-films stacked structure

• Main Authors: Yeo, Alfred, Liu, Mao, Zhou, Kun
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2015
• Subjects: Acoustic emission; Indentation damage; Coating; Dielectric
• Online Access: https://hdl.handle.net/10356/104291; http://hdl.handle.net/10220/38823
• Institution: Nanyang Technological University

A micro-indentation system integrated with an acoustic emission (AE) sensor is used as a damage test method for crack detection of the specimen during the indentation loading–unloading cycle. The specimens investigated are the Si die, and various stacked structures of metallization (Al or Cu) deposi...