Optical metrology under extreme conditions

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Main Authors:	Li, Xide, Pedrini, Giancarlo, Fu, Yu
Other Authors:	Temasek Laboratories
Format:	Article
Language:	English
Published:	2014
Subjects:	DRNTU::Science::Physics::Weights and measures
Online Access:	https://hdl.handle.net/10356/104844 http://hdl.handle.net/10220/20371
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Institution:	Nanyang Technological University
Language:	English

id	sg-ntu-dr.10356-104844
record_format	dspace
spelling	sg-ntu-dr.10356-1048442022-02-16T16:26:09Z Optical metrology under extreme conditions Li, Xide Pedrini, Giancarlo Fu, Yu Temasek Laboratories DRNTU::Science::Physics::Weights and measures Abstract is not available in fulltext. Published version 2014-08-21T06:42:17Z 2019-12-06T21:41:02Z 2014-08-21T06:42:17Z 2019-12-06T21:41:02Z 2014 2014 Journal Article Li, X., Pedrini, G., & Fu, Y. (2014). Optical Metrology under Extreme Conditions. The Scientific World Journal, 2014, 263603-. 1537-744X https://hdl.handle.net/10356/104844 http://hdl.handle.net/10220/20371 10.1155/2014/263603 24982936 en The scientific world journal © 2014 Xide Li et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited. application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
language	English
topic	DRNTU::Science::Physics::Weights and measures
spellingShingle	DRNTU::Science::Physics::Weights and measures Li, Xide Pedrini, Giancarlo Fu, Yu Optical metrology under extreme conditions
description	Abstract is not available in fulltext.
author2	Temasek Laboratories
author_facet	Temasek Laboratories Li, Xide Pedrini, Giancarlo Fu, Yu
format	Article
author	Li, Xide Pedrini, Giancarlo Fu, Yu
author_sort	Li, Xide
title	Optical metrology under extreme conditions
title_short	Optical metrology under extreme conditions
title_full	Optical metrology under extreme conditions
title_fullStr	Optical metrology under extreme conditions
title_full_unstemmed	Optical metrology under extreme conditions
title_sort	optical metrology under extreme conditions
publishDate	2014
url	https://hdl.handle.net/10356/104844 http://hdl.handle.net/10220/20371
_version_	1725985517135200256

Optical metrology under extreme conditions

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