Study of nanocluster-assembled ZnO thin films by nanocluster-beam deposition

Nanocluster-assembled ZnO thin films were obtained by nanocluster-beam deposition, in which nanoclusters were produced by a magnetron sputtering gas aggregation source. Two kinds of ZnO thin films were obtained using this method with the one grown under the on-line heating temperature of 700 °C, and...

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Main Authors: Zhao, Zhiwei, Lei, Wei, Zhang, Xiaobing, Tay, Beng Kang
Other Authors: School of Electrical and Electronic Engineering
Format: Article
Language:English
Published: 2013
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Online Access:https://hdl.handle.net/10356/105012
http://hdl.handle.net/10220/16816
http://dx.doi.org/10.1002/pssc.201084201
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-1050122019-12-06T21:44:29Z Study of nanocluster-assembled ZnO thin films by nanocluster-beam deposition Zhao, Zhiwei Lei, Wei Zhang, Xiaobing Tay, Beng Kang School of Electrical and Electronic Engineering DRNTU::Engineering::Electrical and electronic engineering Nanocluster-assembled ZnO thin films were obtained by nanocluster-beam deposition, in which nanoclusters were produced by a magnetron sputtering gas aggregation source. Two kinds of ZnO thin films were obtained using this method with the one grown under the on-line heating temperature of 700 °C, and the other grown without on-line heating. Film microstructure and optical properties are investigated by various diagnostic techniques. It was found that both of film microstructure of ZnO thin films keep wurtzite structure as that of ZnO bulk materials. The averaged particle size for the film grown without on-line heating is around 6 nm, which is a little lower than that grown with the on-line heating. It was also found that as increasing the wavelength, both of the absorbance spectra for the films decrease sharply near ultra-visible to extend slowly to the visible and infrared wavelength range. For the film grown without on-line heating, the bandgap energy was estimated to 3.77 eV, while for the film grown with on-line heating, the bandgap energy was redshift to 3.71 eV. Similar behavior was also found for PL spectra analysis, where PL spectrum exhibited a peak centered at 3.31 eV without on-line heating, while it redshift to 3.20 eV with on-line heating. The mechanisms behind these behaviors were presented in this article. 2013-10-24T08:00:50Z 2019-12-06T21:44:29Z 2013-10-24T08:00:50Z 2019-12-06T21:44:29Z 2011 2011 Journal Article Zhao, Z., Lei, W., Zhang, X., & Tay, B. K. (2012). Study of nanocluster-assembled ZnO thin films by nanocluster-beam deposition. physica status solidi (c), 9(1), 128-132. 1862-6351 https://hdl.handle.net/10356/105012 http://hdl.handle.net/10220/16816 http://dx.doi.org/10.1002/pssc.201084201 en physica status solidi (c)
institution Nanyang Technological University
building NTU Library
country Singapore
collection DR-NTU
language English
topic DRNTU::Engineering::Electrical and electronic engineering
spellingShingle DRNTU::Engineering::Electrical and electronic engineering
Zhao, Zhiwei
Lei, Wei
Zhang, Xiaobing
Tay, Beng Kang
Study of nanocluster-assembled ZnO thin films by nanocluster-beam deposition
description Nanocluster-assembled ZnO thin films were obtained by nanocluster-beam deposition, in which nanoclusters were produced by a magnetron sputtering gas aggregation source. Two kinds of ZnO thin films were obtained using this method with the one grown under the on-line heating temperature of 700 °C, and the other grown without on-line heating. Film microstructure and optical properties are investigated by various diagnostic techniques. It was found that both of film microstructure of ZnO thin films keep wurtzite structure as that of ZnO bulk materials. The averaged particle size for the film grown without on-line heating is around 6 nm, which is a little lower than that grown with the on-line heating. It was also found that as increasing the wavelength, both of the absorbance spectra for the films decrease sharply near ultra-visible to extend slowly to the visible and infrared wavelength range. For the film grown without on-line heating, the bandgap energy was estimated to 3.77 eV, while for the film grown with on-line heating, the bandgap energy was redshift to 3.71 eV. Similar behavior was also found for PL spectra analysis, where PL spectrum exhibited a peak centered at 3.31 eV without on-line heating, while it redshift to 3.20 eV with on-line heating. The mechanisms behind these behaviors were presented in this article.
author2 School of Electrical and Electronic Engineering
author_facet School of Electrical and Electronic Engineering
Zhao, Zhiwei
Lei, Wei
Zhang, Xiaobing
Tay, Beng Kang
format Article
author Zhao, Zhiwei
Lei, Wei
Zhang, Xiaobing
Tay, Beng Kang
author_sort Zhao, Zhiwei
title Study of nanocluster-assembled ZnO thin films by nanocluster-beam deposition
title_short Study of nanocluster-assembled ZnO thin films by nanocluster-beam deposition
title_full Study of nanocluster-assembled ZnO thin films by nanocluster-beam deposition
title_fullStr Study of nanocluster-assembled ZnO thin films by nanocluster-beam deposition
title_full_unstemmed Study of nanocluster-assembled ZnO thin films by nanocluster-beam deposition
title_sort study of nanocluster-assembled zno thin films by nanocluster-beam deposition
publishDate 2013
url https://hdl.handle.net/10356/105012
http://hdl.handle.net/10220/16816
http://dx.doi.org/10.1002/pssc.201084201
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