Study of nanocluster-assembled ZnO thin films by nanocluster-beam deposition

• Main Authors: Zhao, Zhiwei, Lei, Wei, Zhang, Xiaobing, Tay, Beng Kang
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/105012; http://hdl.handle.net/10220/16816; http://dx.doi.org/10.1002/pssc.201084201
• Institution: Nanyang Technological University

Nanocluster-assembled ZnO thin films were obtained by nanocluster-beam deposition, in which nanoclusters were produced by a magnetron sputtering gas aggregation source. Two kinds of ZnO thin films were obtained using this method with the one grown under the on-line heating temperature of 700 °C, and...