A polymeric microgripper with integrated thermal actuators

• Main Authors: Low, Cassandra Lee-Ngo, Nguyen, Nam-Trung, Ho, Soon-Seng
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2014
• Subjects: DRNTU::Engineering::Materials::Microelectronics and semiconductor materials
• Online Access: https://hdl.handle.net/10356/106154; http://hdl.handle.net/10220/23918; http://dx.doi.org/10.1088/0960-1317/14/7/018
• Institution: Nanyang Technological University

This paper describes the design, simulation, fabrication and characterization of a polymeric microgripper with integrated thermal actuators. The microgripper was fabricated by a polymeric surface micromachining process, which utilizes SU-8 as the functional material and silicon as the sacrificial ma...