A novel checker-patterned AlN MEMS resonator as gravimetric sensor
This paper presents the design and experimental verification of a new class of piezoelectric aluminum nitride (AlN) resonator with checker-patterned electrode architecture for mass sensing applications. The mass sensitivity of the developed sensor is analytically derived and confirmed with FEM simul...
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| Main Authors: | , , , , , |
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| Other Authors: | |
| Format: | Article |
| Language: | English |
| Published: |
2013
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| Online Access: | https://hdl.handle.net/10356/106268 http://hdl.handle.net/10220/17742 http://dx.doi.org/10.1016/j.sna.2012.09.027 |
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| Institution: | Nanyang Technological University |
| Language: | English |
| Summary: | This paper presents the design and experimental verification of a new class of piezoelectric aluminum nitride (AlN) resonator with checker-patterned electrode architecture for mass sensing applications. The mass sensitivity of the developed sensor is analytically derived and confirmed with FEM simulations and experimental results. The results show that a 773 MHz resonator has mass sensitivity of 175.42 μm2/ng and detection limit of 18.7 ng/cm2. The developed sensor has an obtained mass sensitivity of 2–3 times higher than that of state-of-the-art mass sensors and provides high potential for developed piezoelectric transducers for mass sensing applications. |
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