A novel checker-patterned AlN MEMS resonator as gravimetric sensor

A novel checker-patterned AlN MEMS resonator as gravimetric sensor

This paper presents the design and experimental verification of a new class of piezoelectric aluminum nitride (AlN) resonator with checker-patterned electrode architecture for mass sensing applications. The mass sensitivity of the developed sensor is analytically derived and confirmed with FEM simul...

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Bibliographic Details
Main Authors: Lee, Man I., Heidari, Amir, Yoon, Yong-Jin, Khine, Lynn, Park, Mi Kyoung, Tsai, Julius Ming-Lin
Other Authors: School of Mechanical and Aerospace Engineering
Format: Article
Language:English
Published: 2013
Online Access:https://hdl.handle.net/10356/106268
http://hdl.handle.net/10220/17742
http://dx.doi.org/10.1016/j.sna.2012.09.027
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Institution: Nanyang Technological University
Language: English

Internet

https://hdl.handle.net/10356/106268
http://hdl.handle.net/10220/17742
http://dx.doi.org/10.1016/j.sna.2012.09.027

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