High sensitive dielectric filled Lamé mode mass sensor

• المؤلفون الرئيسيون: Heidari, Amir, Yoon, Yong-Jin, Park, Mi Kyoung, Park, Woo-Tae, Tsai, Julius Ming-Lin
• مؤلفون آخرون: School of Mechanical and Aerospace Engineering
• التنسيق: مقال
• اللغة: English
• منشور في: 2013
• الموضوعات: DRNTU::Engineering::Mechanical engineering
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/97645; http://hdl.handle.net/10220/12124

A new high performance mass sensor is designed and fabricated. The mass sensor is a single-crystal silicon squared resonator with dielectric filled capacitive excitation mechanism. The resonators were fabricated using the silicon-on-insulator MEMS process. In order to study the mass sensitivity of t...