High sensitive dielectric filled Lamé mode mass sensor

• Main Authors: Heidari, Amir, Yoon, Yong-Jin, Park, Mi Kyoung, Park, Woo-Tae, Tsai, Julius Ming-Lin
• Other Authors: School of Mechanical and Aerospace Engineering
• Format: Article
• Language: English
• Published: 2013
• Subjects: DRNTU::Engineering::Mechanical engineering
• Online Access: https://hdl.handle.net/10356/97645; http://hdl.handle.net/10220/12124
• Institution: Nanyang Technological University

A new high performance mass sensor is designed and fabricated. The mass sensor is a single-crystal silicon squared resonator with dielectric filled capacitive excitation mechanism. The resonators were fabricated using the silicon-on-insulator MEMS process. In order to study the mass sensitivity of the fabricated resonator, a polyelectrolyte multilayer (PEM) is used to coat on the resonator surface. The resonator has the resonance frequency of 34.81 MHz, mass sensitivity of 105.4 μm2/ng. Experimental measurements of the mass sensitivities agree with theoretical predictions. The new developed mass sensor shows a high potential to be used in gas sensing and bio detection applications.