Surface profile measurement using a laser displacement sensor

• Main Author: Talukdar, Amitava
• Other Authors: Asundi, Anand Krishna
• Format: Theses and Dissertations
• Language: English
• Published: 2008
• Subjects: DRNTU::Engineering::Manufacturing::Metrology; DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• Online Access: http://hdl.handle.net/10356/13470
• Institution: Nanyang Technological University

A three dimensional surface profiling system was developed by integrating a Confocal laser displacement sensor with a X-Y scanning stage. The system allowed to scan a sample point by point over a selected area. For each point on the sample X, Y and Z values were collected. The collected data were us...