Surface profile measurement using a laser displacement sensor
A three dimensional surface profiling system was developed by integrating a Confocal laser displacement sensor with a X-Y scanning stage. The system allowed to scan a sample point by point over a selected area. For each point on the sample X, Y and Z values were collected. The collected data were us...
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| Format: | Theses and Dissertations |
| Language: | English |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/13470 |
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| Institution: | Nanyang Technological University |
| Language: | English |