Design of a laser system for precision measurement
In the area of precision fabrication, the repeatability requirement is in the range of micrometer or even sub-micrometer. In order to realise this stringent requirement, the ability to perform ultra-precision measurement is crucial. Ultra-precision measurement implies not only the measurement of fab...
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/5615 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |