Design of a laser system for precision measurement
In the area of precision fabrication, the repeatability requirement is in the range of micrometer or even sub-micrometer. In order to realise this stringent requirement, the ability to perform ultra-precision measurement is crucial. Ultra-precision measurement implies not only the measurement of fab...
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2008
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sg-ntu-dr.10356-56152023-03-11T17:10:53Z Design of a laser system for precision measurement Chin, Chee Sing. Ngoi, Bryan Kok Ann School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing::Metrology In the area of precision fabrication, the repeatability requirement is in the range of micrometer or even sub-micrometer. In order to realise this stringent requirement, the ability to perform ultra-precision measurement is crucial. Ultra-precision measurement implies not only the measurement of fabricated products but also the measurement in machine feedback control system. Doctor of Philosophy (MPE) 2008-09-17T10:55:02Z 2008-09-17T10:55:02Z 2000 2000 Thesis http://hdl.handle.net/10356/5615 Nanyang Technological University application/pdf |
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DRNTU::Engineering::Manufacturing::Metrology Chin, Chee Sing. Design of a laser system for precision measurement |
| description |
In the area of precision fabrication, the repeatability requirement is in the range of micrometer or even sub-micrometer. In order to realise this stringent requirement, the ability to perform ultra-precision measurement is crucial. Ultra-precision measurement implies not only the measurement of fabricated products but also the measurement in machine feedback control system. |
| author2 |
Ngoi, Bryan Kok Ann |
| author_facet |
Ngoi, Bryan Kok Ann Chin, Chee Sing. |
| format |
Theses and Dissertations |
| author |
Chin, Chee Sing. |
| author_sort |
Chin, Chee Sing. |
| title |
Design of a laser system for precision measurement |
| title_short |
Design of a laser system for precision measurement |
| title_full |
Design of a laser system for precision measurement |
| title_fullStr |
Design of a laser system for precision measurement |
| title_full_unstemmed |
Design of a laser system for precision measurement |
| title_sort |
design of a laser system for precision measurement |
| publishDate |
2008 |
| url |
http://hdl.handle.net/10356/5615 |
| _version_ |
1761781364575698944 |