Design of a laser system for precision measurement
In the area of precision fabrication, the repeatability requirement is in the range of micrometer or even sub-micrometer. In order to realise this stringent requirement, the ability to perform ultra-precision measurement is crucial. Ultra-precision measurement implies not only the measurement of fab...
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| Format: | Theses and Dissertations |
| Published: |
2008
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| Online Access: | http://hdl.handle.net/10356/5615 |
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| Institution: | Nanyang Technological University |
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