Non-mechanical and instantaneous phase-shifting technique for surface profiling
In this research work, a novel method is proposed to achieve non-contact surface profile measurement of ultra-flat surfaces. Resolution and accuracy in nanometer range is attained using non-mechanical and instantaneous phase shifting interferometry This work explores the applicability of instantane...
Saved in:
| Main Author: | |
|---|---|
| Other Authors: | |
| Format: | Theses and Dissertations |
| Published: |
2008
|
| Subjects: | |
| Online Access: | http://hdl.handle.net/10356/6180 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| Institution: | Nanyang Technological University |