Non-mechanical and instantaneous phase-shifting technique for surface profiling

In this research work, a novel method is proposed to achieve non-contact surface profile measurement of ultra-flat surfaces. Resolution and accuracy in nanometer range is attained using non-mechanical and instantaneous phase shifting interferometry This work explores the applicability of instantane...

Full description

Saved in:

Bibliographic Details
Main Author:	Narayanswamy R. Sivakumar
Other Authors:	Ngoi, Bryan Kok Ann
Format:	Theses and Dissertations
Published:	2008
Subjects:	DRNTU::Engineering::Manufacturing::Metrology
Online Access:	http://hdl.handle.net/10356/6180
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	Nanyang Technological University

id	sg-ntu-dr.10356-6180
record_format	dspace
spelling	sg-ntu-dr.10356-61802023-03-11T16:55:50Z Non-mechanical and instantaneous phase-shifting technique for surface profiling Narayanswamy R. Sivakumar Ngoi, Bryan Kok Ann School of Mechanical and Production Engineering DRNTU::Engineering::Manufacturing::Metrology In this research work, a novel method is proposed to achieve non-contact surface profile measurement of ultra-flat surfaces. Resolution and accuracy in nanometer range is attained using non-mechanical and instantaneous phase shifting interferometry This work explores the applicability of instantaneous phase shifting technique to a novel common path optical layout. Doctor of Philosophy (MPE) 2008-09-17T11:08:49Z 2008-09-17T11:08:49Z 2002 2002 Thesis http://hdl.handle.net/10356/6180 Nanyang Technological University application/pdf
institution	Nanyang Technological University
building	NTU Library
continent	Asia
country	Singapore Singapore
content_provider	NTU Library
collection	DR-NTU
topic	DRNTU::Engineering::Manufacturing::Metrology
spellingShingle	DRNTU::Engineering::Manufacturing::Metrology Narayanswamy R. Sivakumar Non-mechanical and instantaneous phase-shifting technique for surface profiling
description	In this research work, a novel method is proposed to achieve non-contact surface profile measurement of ultra-flat surfaces. Resolution and accuracy in nanometer range is attained using non-mechanical and instantaneous phase shifting interferometry This work explores the applicability of instantaneous phase shifting technique to a novel common path optical layout.
author2	Ngoi, Bryan Kok Ann
author_facet	Ngoi, Bryan Kok Ann Narayanswamy R. Sivakumar
format	Theses and Dissertations
author	Narayanswamy R. Sivakumar
author_sort	Narayanswamy R. Sivakumar
title	Non-mechanical and instantaneous phase-shifting technique for surface profiling
title_short	Non-mechanical and instantaneous phase-shifting technique for surface profiling
title_full	Non-mechanical and instantaneous phase-shifting technique for surface profiling
title_fullStr	Non-mechanical and instantaneous phase-shifting technique for surface profiling
title_full_unstemmed	Non-mechanical and instantaneous phase-shifting technique for surface profiling
title_sort	non-mechanical and instantaneous phase-shifting technique for surface profiling
publishDate	2008
url	http://hdl.handle.net/10356/6180
_version_	1761781366455795712

Non-mechanical and instantaneous phase-shifting technique for surface profiling

Similar Items