Surface profile measurement using a laser displacement sensor

• 主要作者: Talukdar, Amitava
• 其他作者: Asundi, Anand Krishna
• 格式: Theses and Dissertations
• 語言: English
• 出版: 2008
• 主題: DRNTU::Engineering::Manufacturing::Metrology; DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics
• 在線閱讀: http://hdl.handle.net/10356/13470

A three dimensional surface profiling system was developed by integrating a Confocal laser displacement sensor with a X-Y scanning stage. The system allowed to scan a sample point by point over a selected area. For each point on the sample X, Y and Z values were collected. The collected data were us...