Control of manufacturing systems with downstream batch processors

Control of manufacturing systems with downstream batch processors

Batch processors can concurrently process more than one batch and are regularly used in the semiconductor manufacturing industry, particularly in the wafer fabrication stage. The reentrant nature of the wafer fab and the incompatibility of jobs from different job families, combined with the typicall...

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書目詳細資料
主要作者:	Cheng, Tajan John Benedict
其他作者:	Stanley Gershwin
格式:	Theses and Dissertations
語言:	English
出版:	2008
主題:	DRNTU::Engineering::Manufacturing::Production management DRNTU::Engineering::Electrical and electronic engineering::Applications of electronics
在線閱讀:	https://hdl.handle.net/10356/13611
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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