Process control with recipe management system

In a semiconductor assembly and test firm, a Recipe Management System is implemented. The system is to help to manage the process programs – called recipes, used for production for each process step. It essentially maintains master recipes in a centralized location and provides automatic upload and...

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Bibliographic Details
Main Author: Kalambur Rajarathinam Vadivazhagu
Other Authors: Kam, Booi Chung
Format: Theses and Dissertations
Published: 2008
Subjects:
Online Access:http://hdl.handle.net/10356/5848
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Institution: Nanyang Technological University