Process control with recipe management system
In a semiconductor assembly and test firm, a Recipe Management System is implemented. The system is to help to manage the process programs – called recipes, used for production for each process step. It essentially maintains master recipes in a centralized location and provides automatic upload and...
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Main Author: | Kalambur Rajarathinam Vadivazhagu |
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Other Authors: | Kam, Booi Chung |
Format: | Theses and Dissertations |
Published: |
2008
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Subjects: | |
Online Access: | http://hdl.handle.net/10356/5848 |
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Institution: | Nanyang Technological University |
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