Suspended microracetrack resonator with lateral sub-wavelength-grating metamaterial cladding for mid-infrared sensing applications

• Main Authors: Zhang, Zecen, Ng, Geok Ing, Hu, Ting, Qiu, Haodong, Guo, Xin, Wang, Wanjun, Mohamed Saïd Rouifed, Liu, Chongyang, Sia, Jiaxu, Zhou, Jin, Wang, Hong
• Other Authors: School of Electrical and Electronic Engineering
• Format: Article
• Language: English
• Published: 2020
• Subjects: Engineering::Electrical and electronic engineering; Mid-infrared Sensing; Metamaterial Cladding
• Online Access: https://hdl.handle.net/10356/137622
• Institution: Nanyang Technological University

A one-time etching suspended microracetrack resonator with lateral sub-wavelength-grating (SWG) metamaterial cladding is theoretically and experimentally demonstrated on commercial 340 nm-thick-top-silicon silicon-on-insulator (SOI) platform for mid-infrared (MIR) bio-chemical sensing applications....