Design and improvements for yield optimization of novel CNT transfer technique

• Main Author: Wong, Marcus Hur Koon
• Other Authors: Tay Beng Kang
• Format: Final Year Project
• Language: English
• Published: Nanyang Technological University 2020
• Subjects: Engineering::Electrical and electronic engineering::Microelectronics
• Online Access: https://hdl.handle.net/10356/138726
• Institution: Nanyang Technological University

The rapid and consistent downscaling of microelectronic devices is fueled by the desire for faster and smaller devices with lower power consumption. However, a major conundrum faced by the industry is the required real estate to achieve proper electromagnetic (EM) shielding to prevent EM interference with surrounding devices. Carbon Nanotubes (CNT) have the potential as an alternative material for EM shielding which would circumvent the real estate restrictions, however, their integration in the modern microelectronic industry is impeded by the high growth temperatures required for CNT which is incompatible with microelectronics. Post-growth transfer techniques have been developed to work around this issue. However, one of the key issues faced is the low yield of successful transfers during the separation of the samples involved in the final stage of the transfer process. Hence, the key focus of this project is to design, fabricate, and characterize a CNT Transfer Rig that can significantly improve the yield of the CNT transfer process. Additionally, insights into the separation process such as the parameters associated with successful transfer have been gleaned.