On-chip thermal emitter for filter-free multi-gas sensing

• Main Author: Guo, Yiyun
• Other Authors: Luo Yu
• Format: Final Year Project
• Language: English
• Published: Nanyang Technological University 2020
• Subjects: Engineering::Electrical and electronic engineering::Microelectromechanical systems
• Online Access: https://hdl.handle.net/10356/138736
• Institution: Nanyang Technological University

In recent decades, gas sensors have been widely used in various industries. The optical gas sensor is also favored by many industries. The powerful absorption of molecules is used to detect gases in the infrared region. However, many optical gas sensors on the market are not compatible with CMOS, high cost, and not particularly efficient. Therefore, this project is implemented to overcome the shortcomings of current optical sensors as well as fill in the research gas for existing optical gas sensor technology. How to design an MPE structure and get a gas absorption peak is the main direction and purpose of the project. This project combines a microelectromechanical system (MEMS) heat plate with the prefect emitter structures to obtain strong absorption in the mid-infrared band. The molecules of CO and CH4 have strong absorption in the mid-infrared range. The purpose of the project is to design a perfect MPE structure, which is suitable for CO and CH4 gas detection.