On-chip mid-infrared thermal emitter for filter-free gas sensing

• المؤلف الرئيسي: Ma, Yixuan
• مؤلفون آخرون: Luo Yu
• التنسيق: Thesis-Master by Coursework
• اللغة: English
• منشور في: Nanyang Technological University 2020
• الموضوعات: Engineering::Electrical and electronic engineering
• الوصول للمادة أونلاين: https://hdl.handle.net/10356/142462
• المؤسسة: Nanyang Technological University

Optical gas sensing system is developing in recent years. Metamaterial can replace the filter in gas sensor. and with the integration of MEMS, it is possible to set up low-cost, CMOS compatible gas sensor. With changing dimension and shape of metamaterial resonator, different gases can be recogniz...