On-chip mid-infrared thermal emitter for filter-free gas sensing

Optical gas sensing system is developing in recent years. Metamaterial can replace the filter in gas sensor. and with the integration of MEMS, it is possible to set up low-cost, CMOS compatible gas sensor. With changing dimension and shape of metamaterial resonator, different gases can be recogniz...

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Main Author: Ma, Yixuan
Other Authors: Luo Yu
Format: Thesis-Master by Coursework
Language:English
Published: Nanyang Technological University 2020
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Online Access:https://hdl.handle.net/10356/142462
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Institution: Nanyang Technological University
Language: English
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spelling sg-ntu-dr.10356-1424622023-07-04T16:46:52Z On-chip mid-infrared thermal emitter for filter-free gas sensing Ma, Yixuan Luo Yu School of Electrical and Electronic Engineering luoyu@ntu.edu.sg Engineering::Electrical and electronic engineering Optical gas sensing system is developing in recent years. Metamaterial can replace the filter in gas sensor. and with the integration of MEMS, it is possible to set up low-cost, CMOS compatible gas sensor. With changing dimension and shape of metamaterial resonator, different gases can be recognized from gas mixture separately. By testing metamaterials with different shapes, the conclusion is concluded that cross-shaped resonator is the most suitable one for filtering with high quality factor. With adjusting the cross-shaped material unit cell, it can detect many gases with resonance peak in mid-IR region. One of the applications of this metamaterial integrated gas sensor is detecting vehicle emission gases. With smaller volume and cheaper price, it still has great research value. Master of Science (Electronics) 2020-06-22T07:25:31Z 2020-06-22T07:25:31Z 2020 Thesis-Master by Coursework https://hdl.handle.net/10356/142462 en application/pdf Nanyang Technological University
institution Nanyang Technological University
building NTU Library
continent Asia
country Singapore
Singapore
content_provider NTU Library
collection DR-NTU
language English
topic Engineering::Electrical and electronic engineering
spellingShingle Engineering::Electrical and electronic engineering
Ma, Yixuan
On-chip mid-infrared thermal emitter for filter-free gas sensing
description Optical gas sensing system is developing in recent years. Metamaterial can replace the filter in gas sensor. and with the integration of MEMS, it is possible to set up low-cost, CMOS compatible gas sensor. With changing dimension and shape of metamaterial resonator, different gases can be recognized from gas mixture separately. By testing metamaterials with different shapes, the conclusion is concluded that cross-shaped resonator is the most suitable one for filtering with high quality factor. With adjusting the cross-shaped material unit cell, it can detect many gases with resonance peak in mid-IR region. One of the applications of this metamaterial integrated gas sensor is detecting vehicle emission gases. With smaller volume and cheaper price, it still has great research value.
author2 Luo Yu
author_facet Luo Yu
Ma, Yixuan
format Thesis-Master by Coursework
author Ma, Yixuan
author_sort Ma, Yixuan
title On-chip mid-infrared thermal emitter for filter-free gas sensing
title_short On-chip mid-infrared thermal emitter for filter-free gas sensing
title_full On-chip mid-infrared thermal emitter for filter-free gas sensing
title_fullStr On-chip mid-infrared thermal emitter for filter-free gas sensing
title_full_unstemmed On-chip mid-infrared thermal emitter for filter-free gas sensing
title_sort on-chip mid-infrared thermal emitter for filter-free gas sensing
publisher Nanyang Technological University
publishDate 2020
url https://hdl.handle.net/10356/142462
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