On-chip mid-infrared thermal emitter for filter-free gas sensing

• Main Author: Ma, Yixuan
• Other Authors: Luo Yu
• Format: Thesis-Master by Coursework
• Language: English
• Published: Nanyang Technological University 2020
• Subjects: Engineering::Electrical and electronic engineering
• Online Access: https://hdl.handle.net/10356/142462
• Institution: Nanyang Technological University

Optical gas sensing system is developing in recent years. Metamaterial can replace the filter in gas sensor. and with the integration of MEMS, it is possible to set up low-cost, CMOS compatible gas sensor. With changing dimension and shape of metamaterial resonator, different gases can be recogniz...