Cyclic scheduling analysis of single-arm cluster tools with wafer residency time constraint and chamber cleaning operations

• Main Authors: Yang, FaJun, Wu, NaiQi, Su, Rong, Qiao, Yan
• Other Authors: School of Electrical and Electronic Engineering
• Format: Conference or Workshop Item
• Language: English
• Published: 2020
• Subjects: Engineering::Electrical and electronic engineering; Linear Programming; Petri Nets
• Online Access: https://hdl.handle.net/10356/140220
• Institution: Nanyang Technological University

In semiconductor manufacturing, a cleaning operation that takes significant time is required for eliminating the chemical residual in a chamber after a wafer being processed and removed from it. Such a cleaning operation makes a traditional backward strategy inefficient. In the existing work, it is...